Innovationsportal Sachsen-Anhalt

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Versa 3D FIB

Von-Danckelmann-Platz 3

06120 Halle (Saale)

Tel.:+49 345 5525320

Fax:+49 345 5527034

Gerätebeschreibung

EM Resolution
1.0 @ 30 kV (SE, with Plasma Cleaner option)

EM Magnification
30x - 1.280.000x

EM Acceleration Voltage
0.2 - 30kV

EM Source
Schottky thermal eld emitter

EDS
Optional

Focused Ion Beam Type
FIB-SEM

Ion Gun
Ga Liquid Metal Ion Source

FIB Resolution
7 nm @ 30 kV at beam coincident point (5 nm achievable at optimal working distance)

FIB Acceleration Voltage
0.5 - 30 kV

Projekte

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